Details of the design can be found here:
P. H. Pham, D. V. Dao, L. B. Dang, and S. Sugiyama, “Single mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators”, Journal of Micromechanics and Microengineering, Vol. 22, No. 1 (20 Dec 2011)
Post time: Jun-13-2017