Micro Car based on MEMS electrostatic Actuator



The Micro transportation system based on MEMS electrostatic actuator. The micro car has a dimension of 0.2 mm x 0.03 mm (W x T). The ‘road’ system consists of straight, turning and T-junction modules.
More details can be found in the following papers:
D. V. Dao, P. H. Pham and S. Sugiyama, “Multi-Module Micro Transportation System Based on Electrostatic Comb-Drive Actuator and Ratchet Mechanism”, IEEE/ASME J. Microelectromechanical Systems (JMEMS), Vol.20/1, 140-149, (2011)


Post time: Jun-21-2017
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