This shows a multilayer thin electrostatic actuator supported by lubricating oil rather than precise ball bearings for a long stroke stage. The purpose of the present research is to realize an easy-to-maintain multilayer thin electrostatic actuator having a simple structure for high-precision motion. Lubricating oil is used to support the mover, which is constructed of thin electrodes, and to reduce the friction between the mover and stator layers. Each layer of the actuator has only one simple electrode that comprises several beams. A suitable driving signal for the electrostatic actuator supported by lubricating oil was investigated experimentally. Based on the results, control systems for the electrostatic actuator using suitable driving signals were designed in order to examine the effectiveness of the actuator. The positioning results indicate that the positioning accuracy is better than 100 nm.
Post time: Jun-12-2017