Visit the “MEMS Characterization platform” of Leti, Institute of CEA Tech :
- In-Line and Out-of-Line 200mm Wafer Level Probe Stations
- 200mm Wafer Vacuum Probe Stations
- RF Probers
- 3D scanning Vibrometer (Polytec Micro Systems Analyzer)
- Environmental MEMS chip characterization
Shaker
Position and Rate Table System
Pressure and Temperature Chamber
- Nano-Indenter
- Magnetic Sensors Test Bench
- Residual Gas Analysis (RGA) Test Bench
- …
Post time: Aug-10-2017