Device operation of a MEMS thermo-electric actuator microfabricated in the MetalMUMPs process from MEMSCAP.
The video has been recorded through an optical microscope at the University of Catania (Italy).
Post time: Jun-21-2017
Device operation of a MEMS thermo-electric actuator microfabricated in the MetalMUMPs process from MEMSCAP.
The video has been recorded through an optical microscope at the University of Catania (Italy).