Low MOQ for TU-1H01 thermal wax actuator for industrial thermostatic water regulations mixing valve Export to Indonesia

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This video shows the first micro comb-drive actuator experiment in Thailand performed on Tuesday 19 th January 2010. This electrostatically driven micro comb-drive actuator had a suspended rotor comb with 19 fingers each of which was 30 microns in width. The stator comb with same dimensions was anchored to the substrate. The main structures of both rotor and stator combs were made of 300 micron-high SU-8 polymer followed by metal coating by sputtering technique. The patterning of this actuator was done by synchrotron x-ray lithography at micromachining lab, the Synchrotron Light Research Institute, Thailand by Winai Wanburee, a graduate student from the Suranaree University of Technology (Ph.D. program in Electrical Engineering). In this first driving experiment, DC pulses of 1 Hz with various amplitudes were fed into the rotor comb while the stator comb was grounded. This experiment showed an important milestone for MEMS community in Thailand.

For more information please contact Dr.Nimit Chomnawang ,
Web site: https://sites.google.com/site/sutmems/ Email: sut.mems@gmail.com
Blog: https://thailandmems.blogspot.com